High-Precision Profile Measurement on Vibration-Isolated Platform
Customized Measurement Solutions for Maximum Precision Requirements – Micrometer Accuracy on Large Measurement Surface

Highest Precision
- Resolution up to 0.4 µm
- Repeatability of 0.5 µm
- Vibration-isolated measuring platform
Large Measurement Range
- Measurement range 550 x 550 mm
- Motorized XY positioning
- Automated measurement sequences
Versatile Applications
- Surface profiling
- Geometric measurement
- 3D form analysis
Application Areas
Quality Control
- Surface inspection
- Dimensional check
- Wear analysis
Research & Development
- Prototype analysis
- Material research
- Deformation analysis
Manufacturing Control
- Tool measurement
- Process monitoring
- Quality documentation
Technical Specifications
Measurement Range
- X-Y Range: 550 x 550 mm
- Z-Axis (Height): ±7.3 mm
- Profile Width: 16 mm
Accuracy
- Z-Axis: 0.4 µm
- X-Axis: 0.5 µm
- Sampling Rate: 16 kHz
System Benefits
- Vibration-isolated platform
- Automated measurement sequences
- 3D visualization